文献类型：期刊文献

英文题名：The Design, Simulation and Fabrication of an Omnidirectional Inertial Switch with Rectangular Suspension Spring

作者：Chen, Wenguo Wang, Rui Wang, Huiying Sun, Shulei

第一作者：Chen, Wenguo

通信作者：Chen, WG[1]

机构：[1]Qujing Normal Univ, Coll Informat Engn, Qujing 655000, Peoples R China;[2]Guizhou Inst Technol, Coll Mech Engn, Guiyang 550003, Peoples R China

第一机构：Qujing Normal Univ, Coll Informat Engn, Qujing 655000, Peoples R China

通信机构：corresponding author), Qujing Normal Univ, Coll Informat Engn, Qujing 655000, Peoples R China.

年份：2021

卷号：12

期号：4

外文期刊名：MICROMACHINES

收录：;EI(收录号：20211810292326);Scopus(收录号：2-s2.0-85104977550);WOS:【SCI-EXPANDED(收录号:WOS:000643301300001)】；

基金：This research was funded by the Important Fund for Basic Research of Local Colleges in Yunnan Province (No. 2017FH001-008). This work was also supported by the National Natural Science Foundation of China (No. 51605107), Guizhou Provincial Science and Technology Foundation (Qiankehejichu [2016]1063), and The Joint Fund of Guizhou Province (No. 20167105).

语种：英文

外文关键词：MEMS; inertial micro-switch; surface micromachining; contact time; rectangular suspension spring

摘要：An omnidirectional inertial switch with rectangular spring is proposed in this paper, and the prototype has been fabricated by surface micromachining technology. To evaluate the threshold consistency and stability of omnidirectional inertia switch, the stiffness of rectangular suspension springs is analyzed. The simulation result shows that the coupling stiffness of the rectangular spring suspension system in the non-sensitive direction is a little more than that in the sensitive direction, which indicated that the omnidirectional switching system's stability is reinforced, attributed to the design of rectangular springs. The dynamic response simulation shows that the threshold of the omnidirectional inertial switch using the rectangular suspension spring has high consistency in the horizontal direction. The prototype of an inertial switch is fabricated and tested successfully. The testing results indicate even threshold distribution in the horizontal direction. The threshold acceleration of the designed inertial switch is about 58 g in the X direction and 37 g in the Z direction; the contact time is about 18 mu s.