文献类型：期刊文献

英文题名：The Analysis of the Influence of Threshold on the Dynamic Contact Process of a Fabricated Vertically Driven MEMS Inertial Switch

作者：Chen, Wenguo Wang, Rui Wang, Huiying Kong, Dejian Sun, Shulei

第一作者：Chen, Wenguo

通信作者：Kong, DJ[1]

机构：[1]Qujing Normal Univ, Coll Informat Engn, Qujing 655000, Peoples R China;[2]Guizhou Inst Technol, Coll Mech Engn, Guiyang 550003, Guizhou, Peoples R China

第一机构：Qujing Normal Univ, Coll Informat Engn, Qujing 655000, Peoples R China

通信机构：corresponding author), Qujing Normal Univ, Coll Informat Engn, Qujing 655000, Peoples R China.

年份：2019

卷号：10

期号：11

外文期刊名：MICROMACHINES

收录：;EI(收录号：20194807757363);Scopus(收录号：2-s2.0-85075569062);WOS:【SCI-EXPANDED(收录号:WOS:000502255300077)】；

基金：This work is supported by the National Natural Science Foundation of China (No. 51605107); The Important Fund for Basic research of Local Colleges in Yunnan Province (No. 2017FH001-008), Guizhou Provincial Science and Technology Foundation (Qiankehejichu[2016]1063); The Joint Fund of Guizhou Province (No. 20167105).

语种：英文

外文关键词：MEMS inertial switch; surface micromachining; dynamic contact process; threshold

摘要：In this work, to evaluate the influence of the threshold on the dynamic contact process, five models (number 1, 2, 3, 4, 5) with different thresholds were proposed and fabricated with surface micromachining technology. The contact time and response time were used to characterize the dynamic contact performance. The dynamic contact processes of the inertial switches with gradually increasing thresholds were researched using analytical, simulation, and experimental methods. The basic working principle analysis of the inertial switch shows that the contact time of the inertial switch with a low-g value can be extended by using a simply supported beam as the fixed electrode, but the high-G inertial needs more elasticity for fixed electrode. The simulation results indicate that the response time and contact time decrease with the increment in the designed threshold. Prototypes were tested using a dropping hammer system, and the test result indicates that the contact time of the inertial switch with a fixed electrode of the simply supported beam is about 15 and 5 mu s when the threshold is about 280 and 580 g, respectively. Meanwhile, the contact time can be extended to 100 mu s for the inertial switch using a spring as the fixed electrode when the threshold is about 280 and 580 g. These test results not only prove that the spring fixed electrode can effectively extend the contact time, but also prove that the style of the fixed electrode is the deciding factor affecting the contact time of the high-G inertial switch.