文献类型：期刊文献

英文题名：AIRFLOW SIMULATION OF LINEAR GRATING LITHOGRAPHY WORKSHOP

作者：Yin, Hong Sun, Dong Li, Xingyuan Huan, Ping

第一作者：Yin, Hong

通信作者：Yin, H[1]

机构：[1]Guizhou Univ, Coll Mech Engn, Guiyang, Guizhou, Peoples R China;[2]Guizhou Inst Technol, Coll Mech Engn, Guiyang, Guizhou, Peoples R China

第一机构：Guizhou Univ, Coll Mech Engn, Guiyang, Guizhou, Peoples R China

通信机构：corresponding author), Guizhou Univ, Coll Mech Engn, Guiyang, Guizhou, Peoples R China.

年份：2015

卷号：33

期号：2

起止页码：109-114

外文期刊名：INTERNATIONAL JOURNAL OF HEAT AND TECHNOLOGY

收录：EI(收录号：20153201105664);Scopus(收录号：2-s2.0-84938401580);WOS:【ESCI(收录号:WOS:000216067600018)】；

基金：The project is supported by Guizhou Science and Technology Department (No. (2012) 6020 and No.(2013) 6003).

语种：英文

外文关键词：Lithography; CFD; Velocity field; Temperature field

摘要：Lithography manufacturing process of linear grating is a complex precision manufacturing process, good environmental conditions are conducive to improve product quality, air velocity and temperature field formed by the air conditioning of a certain lithography workshop are simulated by the CFD in this paper and the parameters of the air conditioning is determined to meet the technology requirement, while influence of air temperature and velocity to the air flow of workshop is researched. The thermal deformation accounts for comprehensive deformation of 0.89%. The proportion is a great impact in precision manufacturing and need to be fully considered in the subsequent equipment improvements. The research can provide a theoretical basis for the actual production, test cost and test time can be reduced.