文献类型：期刊文献

英文题名：The Elastic Contact and Stability Analysis of an Inertial Micro-Switch with a Spring Stationary Electrode

作者：Chen, Wenguo Wang, Huiying Kong, Dejian Sun, Shulei

第一作者：Chen, Wenguo

通信作者：Chen, WG[1]

机构：[1]Qujing Normal Univ, Sch Informat Engn, Qujing 655000, Yunnan, Peoples R China;[2]Guizhou Inst Technol, Sch Mech Engn, Guiyang 550003, Guizhou, Peoples R China

第一机构：Qujing Normal Univ, Sch Informat Engn, Qujing 655000, Yunnan, Peoples R China

通信机构：corresponding author), Qujing Normal Univ, Sch Informat Engn, Qujing 655000, Yunnan, Peoples R China.

年份：2018

卷号：18

期号：12

外文期刊名：SENSORS

收录：;EI(收录号：20185006231109);Scopus(收录号：2-s2.0-85058021695);WOS:【SCI-EXPANDED(收录号:WOS:000454817100157)】；

基金：This work is supported by the National Natural Science Foundation of China (No. 51605107), the Important Fund for Basic research of Local Colleges in Yunnan Province (No. 2017FH001-008), Science and Technology Project of Guizhou Province (No. 20161063), the Joint Fund of Guizhou Province (No. 20167105).

语种：英文

外文关键词：MEMS; inertial micro; switch; surface micromachining; contact time; spring stationary electrode

摘要：A mechanical trigger inertial micro-switch with spring stationary electrode is proposed and fabricated by surface micromachining. The elastic contact process and stability performance are evaluated through experimental tests performed using a drop hammer. The test results show that the contact time is about 110 mu s and 100 mu s when the threshold acceleration is 480 g and the overload acceleration is 602 g, respectively. The vibration process of the electrodes is explained through an established physical mode. The elastic contact process is analyzed and discussed by Finite Element Analysis (FEA) simulations, which indicated that the contact time is about 65 mu s when the threshold acceleration is 600 g. At the same time, this result also proved that the contact time could be extended effectively by the designed spring stationary electrode. The overload acceleration (800 g) has been applied to the Finite-Element model in ANSYS, the contact process indicated that the proof mass contacted with stationary electrode three times, and there was no bounce phenomenon during contact process, which fully proved that the stable contact process can be realized at high acceleration owing to the designed elastic stationary electrode.