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Effects of gold film thickness and annealing time on diameter of silicon nanowires grown by VLS process  ( SCI-EXPANDED收录)  

文献类型:期刊文献

英文题名:Effects of gold film thickness and annealing time on diameter of silicon nanowires grown by VLS process

作者:Li, Z. Tang, A. -J. Tang, S. -Y. Hu, D. -W. Tian, H. -X. Wang, W.

第一作者:Li, Z.

通信作者:Tang, AJ[1]

机构:[1]Guizhou Univ, Sch Chem & Chem Engn, Guiyang 550025, Peoples R China;[2]Guizhou Inst Technol, Sch Chem Engn, Guiyang 550003, Peoples R China

第一机构:Guizhou Univ, Sch Chem & Chem Engn, Guiyang 550025, Peoples R China

通信机构:corresponding author), Guizhou Inst Technol, Sch Chem Engn, Guiyang 550003, Peoples R China.|贵州理工学院化学工程学院;贵州理工学院;

年份:2021

卷号:16

期号:3

起止页码:1127-1136

外文期刊名:DIGEST JOURNAL OF NANOMATERIALS AND BIOSTRUCTURES

收录:;Scopus(收录号:2-s2.0-85114668761);WOS:【SCI-EXPANDED(收录号:WOS:000709123600032)】;

基金:This work was supported by the National Natural Science Foundation of China (No. 2176060184) , the Science and Technology Project of Guizhou Province (No. Qian Ke He Ping Tai Ren Cai [2019] 5609) , the Science and Technology Planning Project of Guizhou Province (Qian Ke He Zhi Cheng [2021] Yiban 493) , and GIT Academic Seedling Training and Innovation Exploration Project (No. GZLGXM-11) .

语种:英文

外文关键词:Silicon nanowires; Annealing; Alloy droplets; VLS growth mechanism

摘要:In this paper, silicon nanowires were prepared by chemical vapor deposition (CVD) in the presence of gold catalyst. We discussed the effects of gold film thickness and annealing time on droplet diameter and silicon nanowire diameter. The study revealed that the diameter of silicon nanowires increases with the increase of the thickness of the gold film. With the increase of annealing time, the number of alloy droplets decreases, and the diameter increases. The average diameter of silicon nanowires decreases first and then increases. The results provide useful information for long-time annealing of silicon nanowires.

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